IEEE - Institute of Electrical and Electronics Engineers, Inc. - Evaluation of electrode materials for ion implanters

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Vanderberg, B.H. ; Perel, A.S. ; Horsky, T.N.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812088
Regular:

A quantitative evaluation of electrical breakdown properties of seventeen different materials, including metals, composite materials and graphites, is presented. The microscopic field... View More

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