IEEE - Institute of Electrical and Electronics Engineers, Inc. - Cost of ownership methodology for 300 mm ion implantation processes

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Parrill, T.M. ; Robak, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812081
Regular:

IC manufacturers have stated that the price of 300 mm process equipment should be no more than 1.3 times the 200 mm equivalent equipment. Further, simultaneous technology advances are required for... View More

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