IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microlens fabrication using Cl/sub 2//Ar CAIBE optimized by 2 level factorial design of experiments (DOE)

1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting

Author(s): Yu, J.S. ; Yang, S.K. ; Choo, A.G. ; Kim, T.I.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Francisco, CA, USA, USA
Conference Date: 8 November 1999
Volume: 1
ISBN (Paper): 0-7803-5634-9
ISSN (Paper): 1092-8081
DOI: 10.1109/LEOS.1999.813497
Regular:

A new microlens fabrication method using Cl/sub 2/-Ar chemically assisted ion beam etching (CAIBE) was presented. Smooth lens surface and shorter etching time were the main advantages over the... View More

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