IEEE - Institute of Electrical and Electronics Engineers, Inc. - Solder self-alignment for optical MEMS

1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting

Author(s): Harsh, K.F. ; Kladitis, P.E. ; Michalicek, M.A. ; Jianglong Zhang ; Wenge Zhang ; Tuantranont, A. ; Bright, V.M. ; Lee, Y.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Francisco, CA, USA, USA
Conference Date: 8 November 1999
Volume: 2
ISBN (Paper): 0-7803-5634-9
ISSN (Paper): 1092-8081
DOI: 10.1109/LEOS.1999.812006
Regular:

This paper discusses the use of solder self-alignment to assemble novel three-dimensional MEMS and package MEMS with other optical devices with precision alignment. Soldering is a predominant... View More

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