IEEE - Institute of Electrical and Electronics Engineers, Inc. - Nickel-indiffused lithium niobate ridge optical waveguides fabricated by a novel self-aligned process

1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting

Author(s): Wen-Ching Chang ; Chao-Yung Sue ; Cha-Lu Hsu ; Li-Ying Chang ; Han-Bin Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Francisco, CA, USA, USA
Conference Date: 8 November 1999
Volume: 2
ISBN (Paper): 0-7803-5634-9
ISSN (Paper): 1092-8081
DOI: 10.1109/LEOS.1999.811924
Regular:

The fabrication process for the self-aligned technique is illustrated. At first, the patterns of waveguides are transferred onto the LiNbO/sub 3/ substrate by the photolithographic process. Then,... View More

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