IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated optical waveguide components fabricated by LIGA technique

1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting

Author(s): Paatzsch, T. ; Bauer, H.-D. ; Gaudron, A. ; Jobst, B. ; Stadler, S. ; Popp, M. ; Smaglinski, I. ; Ehrfeld, W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Francisco, CA, USA, USA
Conference Date: 8 November 1999
Volume: 2
ISBN (Paper): 0-7803-5634-9
ISSN (Paper): 1092-8081
DOI: 10.1109/LEOS.1999.811893
Regular:

The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide... View More

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