IEEE - Institute of Electrical and Electronics Engineers, Inc. - MEMS for free-space optical switching

1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting

Author(s): Lin, L.Y. ; Goldstein, E.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Francisco, CA, USA, USA
Conference Date: 8 November 1999
Volume: 2
ISBN (Paper): 0-7803-5634-9
ISSN (Paper): 1092-8081
DOI: 10.1109/LEOS.1999.811809
Regular:

Micro-electro-mechanical-systems (MEMS), with its unique ability to integrate electrical, mechanical, and optical elements on a single chip, has demonstrated high potential for realizing... View More

Advertisement