IEEE - Institute of Electrical and Electronics Engineers, Inc. - Automatic monitoring and analysis of engineering experiments

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Beal, G. ; Moller, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 423 - 426
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808826
Regular:

Yield and process improvement experiments generate enormous amounts of data that need to be analyzed. The sheer volume of data tends to overwhelm even the most enthusiastic engineer. A "hands-off"... View More

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