IEEE - Institute of Electrical and Electronics Engineers, Inc. - High-speed and sensitive multiple-point ammonia gas monitor system

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Matsuyoshi, Y. ; Satoh, Y. ; Shinozaki, T. ; Suzuki, E. ; Nagata, N.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 409 - 412
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808823
Regular:

In order to get a precise pattern control in a chemically amplified photo-resist process, the high performance multi-point ammonia gas monitor was developed. A single point high speed and... View More

Advertisement