IEEE - Institute of Electrical and Electronics Engineers, Inc. - Yield improvement using data mining system

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Mieno, F. ; Sato, T. ; Shibuya, Y. ; Odagiri, K. ; Tsuda, H. ; Take, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 391 - 394
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808818
Regular:

It is ideal to prevent all failures. However, when a failure occurs, it is important to quickly specify the cause stage and take countermeasures. There are various types of failures, ranging from... View More

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