IEEE - Institute of Electrical and Electronics Engineers, Inc. - Advanced defect-kill-rate estimation and yield analysis incorporating defect clustering

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Kikuchi, H. ; Nishio, N. ; Ikeyama, K. ; Misumi, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 387 - 390
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808817
Regular:

A method is described for estimating the defect kill rate and analyzing the yield from line-monitoring data. The kill rate is obtained by solving simultaneous equations with respect to the number... View More

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