IEEE - Institute of Electrical and Electronics Engineers, Inc. - Combined x-ray tool for process control of compound dielectric films

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Terada, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 365 - 368
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808812
Regular:

Thickness is an important parameter that must be controlled in the production of films for microelectronic devices. If a film is composed of two or more components, composition control is also... View More

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