IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis of abnormal Pch Vt distribution in wafer caused by implanter

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Nishimura, K. ; Maeda, T. ; Inoue, T. ; Suzuki, T. ; Katsumoto, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 341 - 344
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808806
Regular:

In this paper, we report an analysis in which the abnormal p-channel threshold voltage (Pch Vt) distribution in a wafer was found to be due to the malfunction of an implanter at the Pch Vt... View More

Advertisement