IEEE - Institute of Electrical and Electronics Engineers, Inc. - Equipment and APC integration at AMD with workstream

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Lantz, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 325 - 327
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808801
Regular:

This paper discusses the reason for starting the equipment integration project at AMD's Submicron Development Center, SDC, and how it led to the development of the APC framework. The architecture... View More

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