IEEE - Institute of Electrical and Electronics Engineers, Inc. - Continuous and independent monitor wafer reduction in DRAM fab

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Watanabe, A. ; Kobayashi, T. ; Egi, T. ; Yoshida, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 303 - 306
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808796
Regular:

DRAM short product life cycle and intense cost reduction battle in the market require monitor wafer effective reduction in manufacturing. Actions for monitor wafer reduction are as follows: we... View More

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