IEEE - Institute of Electrical and Electronics Engineers, Inc. - Operator error prevention system of semiconductor foundry manufacturing

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Chien-Chung Huang ; Hsu, S.H. ; Gu-Lung Lin ; Shiao-Jong Hu ; Hsiang-Yin Shen ; Hsiao-Lung Chu ; Wen-Yao Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 285 - 287
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808791
Regular:

The purpose of this paper is to introduce the operator error prevention system. This system divides the prevention process of operator-related errors into several stages: (1) task analyses and... View More

Advertisement