IEEE - Institute of Electrical and Electronics Engineers, Inc. - Environmentally conscious APM: efficient dilution based on theoretical approach

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Kobayashi, T. ; Inoue, Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 263 - 266
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808786
Regular:

A more efficient APM dilution method was introduced into our manufacturing process, along with an advanced model. The new chemical mixing ratio of diluted APM was fixed at NH/sub 4/OH/H/sub... View More

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