IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel assessment of process control monitor in advanced semiconductor manufacturing: a complete set of addressable failure site test structures (AFS-TS)

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Sunnys Hsieh ; Sheng-Che Lin ; Ming-Huei Lee ; Jian-Rong Wang ; Chingfu Lin ; Chia-Wen Huang ; Jye-Yen Cheng ; Yu-Hao Yang ; Doong, K.Y.-Y. ; Miyamoto, K. ; Hsu, C.C.-H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 241 - 244
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808781
Regular:

This work describes the implementation of a novel assessment of process control monitor in advanced semiconductor manufacturing. It manifests the design and simulation results of addressable... View More

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