IEEE - Institute of Electrical and Electronics Engineers, Inc. - Engineering to the least process monitoring

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Amanda Woolverton ; John Chu ; Phil Freiberger ; E. Stewart ; Alan Wong ; C. Engelhard ; R. Amick ; V. Dhar
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page Count: 4
Page(s): 237 - 240
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808780
Regular:

To achieve both goals of drastically reducing process monitoring and maintaining high product quality, CTM/D2 (California Technology and Manufacturing Group) at Intel has taken a new approach in... View More

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