IEEE - Institute of Electrical and Electronics Engineers, Inc. - Reduction of probe to pad contact resistance: technology development targeted for cost effectiveness Pentium II(R) processors testing

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Roggei, A. ; Seshan, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 217 - 219
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808775
Regular:

This paper presents work done during the technology development phase in Intel. The goal was to achieve capability and cost effectiveness for high volume manufacturing of Pentium II(R) processors.... View More

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