IEEE - Institute of Electrical and Electronics Engineers, Inc. - Improving process control for older-generation tools by implementing equipment-level SPC

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Smith, D.D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 213 - 216
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808774
Regular:

With a properly implemented system, equipment-level SPC of process input variables dramatically increases sensitivity to process variations than traditional output SPC. We demonstrate that such a... View More

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