IEEE - Institute of Electrical and Electronics Engineers, Inc. - Weighted configuration matrix approach to cluster tool metrics

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Dolman, D. ; Christian, C. ; Qingsu Wang ; Crowley, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 179 - 182
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808766
Regular:

A weighted configuration matrix method is introduced. With this method equipment users can easily configure a cluster tool and apply the existing industry metrics, such as E10 and OEE, to monitor... View More

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