IEEE - Institute of Electrical and Electronics Engineers, Inc. - Evaluation of 300 mm wafer boxes with UV/photoelectron cleaning capability

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Yokoyama, S. ; Hara, Y. ; Yoshino, T. ; Suzuki, T. ; Fujii, T. ; Ohyama, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 169 - 172
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808764
Regular:

New plastic wafer boxes with cleaning capability for gaseous contamination harmful to LSI fabrication processes have been developed. The contamination gases are effectively reduced by attaching a... View More

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