IEEE - Institute of Electrical and Electronics Engineers, Inc. - Layer yield estimation based on critical area and electrical defect monitor data

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Milor, L. ; Hill, G. ; Yeng Peng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 99 - 102
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808747
Regular:

It is often desirable to forecast the random yield of each layer of new products. In this work we provide a yield forecasting methodology based on critical area, which goes beyond comparing die... View More

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