IEEE - Institute of Electrical and Electronics Engineers, Inc. - Segment-based approach for real-time reactive rescheduling for automatic manufacturing control

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Toba, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 69 - 72
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808740
Regular:

We propose a new segment-based approach for a real-time reactive rescheduling method, which is applicable to actual large-scale manufacturing systems, such as fully-automated semiconductor wafer... View More

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