IEEE - Institute of Electrical and Electronics Engineers, Inc. - Using an inverted FMEA to manage change and reduce risk in a FAB

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Trahan, R. ; Pollock, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 15 - 18
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808727
Regular:

This paper presents a Change Management System which incorporates the elements found in most semiconductor factories. They include the following: A Change Review Board; Checklist of... View More

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