IEEE - Institute of Electrical and Electronics Engineers, Inc. - Determining capacity loss from operational and technical deployment practices in a semiconductor manufacturing line

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Author(s): Marcoux, P. ; McClintock, M. ; Martin, D. ; Woods, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 11 October 1999
Page(s): 3 - 5
ISBN (Paper): 0-7803-5403-6
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.1999.808724
Regular:

This paper describes a data analysis system that accurately measures the amount of capacity lost from both operational and technical deployment issues. Deployment is defined as instances where WIP... View More

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