IEEE - Institute of Electrical and Electronics Engineers, Inc. - Measurement of MEMS Displacements and Frequencies Using Laser Interferometry

Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering

Author(s): Wylde, J. ; Hubbard, T.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Edmonton, Alberta, Canada, Canada
Conference Date: 9 May 1999
Volume: 3
Page(s): 1,716 - 1,721
ISBN (Paper): 0-7803-5579-2
ISSN (Paper): 0840-7789
DOI: 10.1109/CCECE.1999.804976
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