IEEE - Institute of Electrical and Electronics Engineers, Inc. - Humidity measurement using resonating CMOS microcantilever structures

Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering

Author(s): Strembicke, D. ; Robinson, A.M. ; Vermeulen, F.E. ; Seto, M. ; Brown, K.B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Edmonton, Alberta, Canada, Canada
Conference Date: 9 May 1999
Volume: 3
ISBN (Paper): 0-7803-5579-2
ISSN (Paper): 0840-7789
DOI: 10.1109/CCECE.1999.804966
Regular:

Changes in relative humidity can be detected by the modification in resonance frequency of an oscillating microcantilever. Mass changes due to the absorption of water vapour by an applied... View More

Advertisement