IEEE - Institute of Electrical and Electronics Engineers, Inc. - Dynamic response of a magnetically actuated micromachined cantilever with a Permalloy electroplated film

Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering

Author(s): Yu, B. ; Allegretto, W. ; Robinson, A.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Edmonton, Alberta, Canada, Canada
Conference Date: 9 May 1999
Volume: 3
ISBN (Paper): 0-7803-5579-2
ISSN (Paper): 0840-7789
DOI: 10.1109/CCECE.1999.804963
Regular:

A magnetically actuated cantilever structure was designed, fabricated, and tested. The actuation of the device is based on the interaction between a Permalloy film and an external magnetic field.... View More

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