IEEE - Institute of Electrical and Electronics Engineers, Inc. - MEMS based on III-V-compounds for sensing applications and optical communication

1999 57th Annual Device Research Conference Digest

Author(s): H.L. Hartnagel ; K. Mutamba ; J. Pfeiffer ; J. Peerlings
Sponsor(s): IEEE Electron Devices Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Barbara, CA, USA, USA
Conference Date: 23 June 1999
Page Count: 4
Page(s): 112 - 115
ISBN (Paper): 0-7803-5170-3
DOI: 10.1109/DRC.1999.806342
Regular:

Recent developments in micromachining techniques based on III-V-compounds have led to the fabrication of new sensing and actuator devices for a variety of applications in control and measurement... View More

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