IEEE - Institute of Electrical and Electronics Engineers, Inc. - A nanoscale ohmic contact for nanoelectronic devices

1999 57th Annual Device Research Conference Digest

Author(s): D.B. Janes ; R.P. Andres ; E.-H. Chen ; N.-P. Chen ; R. Reifenberger ; T. Lee ; Jia Liu ; M.R. Melloch ; H.J. Ueng ; J.M. Woodall
Sponsor(s): IEEE Electron Devices Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Santa Barbara, CA, USA, USA
Conference Date: 23 June 1999
Page Count: 2
Page(s): 60 - 61
ISBN (Paper): 0-7803-5170-3
DOI: 10.1109/DRC.1999.806323
Regular:

In this presentation, we report the development and characterization of low-resistance nanometer scale ohmic contacts which provide suitable characteristics for application in nanoelectronic... View More

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