IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated statistical process control as a productivity improvement tool

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Bowen, C.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 430 - 431
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798308
Regular:

Statistical Process Control (SPC) is typically viewed as a quality assurance tool in modern semiconductor manufacturing. SPC methods such as design of experiments and control charting are commonly... View More

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