IEEE - Institute of Electrical and Electronics Engineers, Inc. - Advanced process development and control based on a fully automated SEM with ADC

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Ben-Porath, A. ; Hayes, T. ; Skumanich, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 275 - 280
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798242
Regular:

A novel system is presented which provides complete automation of the SEM review and classification process, allowing full integration of the SEM into the production line. This automation... View More

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