IEEE - Institute of Electrical and Electronics Engineers, Inc. - SEMATECH and equipment suppliers partner to reduce development costs at the 180 nm generation

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Beach, J.V. ; McDonald, C.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 217 - 221
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798228
Regular:

This paper discusses one example of a general partnership between SEMATECH and equipment suppliers. It illustrates the benefits Fairchild Technologies, Silicon Valley Group Lithography (SVGL) and... View More

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