IEEE - Institute of Electrical and Electronics Engineers, Inc. - Tool capacity improvement through specialization of operator activities

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Foster, J. ; Hennessy, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 191 - 196
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798220
Regular:

This paper is a case study illustrating the success of re-deploying a subset of operators to perform specialized tasks to recoup tool capacity. In a large fabricator, where the same tool type is... View More

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