IEEE - Institute of Electrical and Electronics Engineers, Inc. - Managing the negative impact of recipe diversity on wet process tools and capacity: a multi-fabricator model

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Carpenter, N. ; Hilscher, D.F.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 168 - 171
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798214
Regular:

This paper describes the results of a multi-fabricator site team in minimizing recipe diversity; the metrics used to measure the progress of the team are also defined. By identifying and measuring... View More

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