IEEE - Institute of Electrical and Electronics Engineers, Inc. - Interconnect technology and design implications for future ASIC and system-on-a-chip (SOC) implementations

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Gutmann, R.J. ; Chan, K. ; Graves, R.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 164 - 167
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798213
Regular:

Back-end-of-the-line (BEOL) interconnect technology is undergoing a rapid transformation as a result of the projected impact on IC performance at decreasing minimum feature sizes. As a... View More

Advertisement