IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ensemble average laser light scattering (EALLS)-an effective alternative to particle counting for monitoring turbidity in ultrapure water [for semiconductor rinsing]

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Banerjee, A. ; Lambertson, M. ; Scarpine, D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 143 - 148
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798203
Regular:

A high sensitivity laser light scattering (LLS) instrument capable of measuring nephelometric turbidity in ultrapure water (UPW) is described. Readings from various stages of the purification... View More

Advertisement