IEEE - Institute of Electrical and Electronics Engineers, Inc. - A methodology for determining capacity consumption due to the sampling of lots within the photolithography metrology sector in a multi-part number, multi-technology fabricator

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Butler, K.L. ; Woods, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 113 - 116
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798195
Regular:

The current semiconductor business environment requires companies to provide their customers with many chip design options. This drives a large diversification in product and technology mix within... View More

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