IEEE - Institute of Electrical and Electronics Engineers, Inc. - A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings

Author(s): Bader, U. ; Besler, A. ; Schliesser, J. ; Dorner, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Boston, Massachusetts, USA, USA
Conference Date: 8 September 1999
Page(s): 109 - 112
ISBN (Paper): 0-7803-5217-3
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.1999.798193
Regular:

The mounting pressure of costs in the semiconductor industry has led to the use of increasingly complex production sequences, bigger substrates and shorter planning times. More and more, this also... View More

Advertisement