IEEE - Institute of Electrical and Electronics Engineers, Inc. - A reliable 0.1 /spl mu/m Ta/sub 2/O/sub 5/ transistor manufactured with an almost standard CMOS process

1999 Symposium on VLSI Technology. Digest of Technical Papers

Author(s): T. Devoivre ; C. Papadas ; M. Setton
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 14 June 1999
Page Count: 2
Page(s): 131 - 132
ISBN (Paper): 4-930813-93-X
DOI: 10.1109/VLSIT.1999.799378
Regular:

This paper presents a 0.1 /spl mu/m Ta/sub 2/O/sub 5/ transistor, manufactured with an almost standard CMOS process. A complete set of electrical characteristics is presented and nonsilicided... View More

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