IEEE - Institute of Electrical and Electronics Engineers, Inc. - Smart pockets-total suppression of roll-off and roll-up [MOSFET doping]

1999 Symposium on VLSI Technology. Digest of Technical Papers

Author(s): R. Gwoziecki ; T. Skotnicki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 14 June 1999
Page Count: 2
Page(s): 91 - 92
ISBN (Paper): 4-930813-93-X
DOI: 10.1109/VLSIT.1999.799355
Regular:

We have demonstrated that with use of pocket implants, there exists an asymptotic threshold voltage-gate length (V/sub th/-L) curve which can only be shifted to shorter device lengths if a larger... View More

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