IEEE - Institute of Electrical and Electronics Engineers, Inc. - SON (silicon on nothing)-a new device architecture for the ULSI era
1999 Symposium on VLSI Technology. Digest of Technical Papers
Author(s): | M. Jurczak ; T. Skotnicki ; M. Paoli ; B. Tormen ; J.-L. Regolini ; C. Morin ; A. Schiltz ; J. Martins ; R. Pantel ; J. Galvier |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 January 1999 |
Conference Location: | Kyoto, Japan, Japan |
Conference Date: | 14 June 1999 |
Page Count: | 2 |
Page(s): | 29 - 30 |
ISBN (Paper): | 4-930813-93-X |
DOI: | 10.1109/VLSIT.1999.799324 |
Regular:
A novel device architecture called SON (silicon on nothing) is proposed, allowing extremely thin buried oxides and silicon films to be fabricated and thereby provide better resistance to short... View More