IEEE - Institute of Electrical and Electronics Engineers, Inc. - SON (silicon on nothing)-a new device architecture for the ULSI era

1999 Symposium on VLSI Technology. Digest of Technical Papers

Author(s): M. Jurczak ; T. Skotnicki ; M. Paoli ; B. Tormen ; J.-L. Regolini ; C. Morin ; A. Schiltz ; J. Martins ; R. Pantel ; J. Galvier
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 14 June 1999
Page Count: 2
Page(s): 29 - 30
ISBN (Paper): 4-930813-93-X
DOI: 10.1109/VLSIT.1999.799324
Regular:

A novel device architecture called SON (silicon on nothing) is proposed, allowing extremely thin buried oxides and silicon films to be fabricated and thereby provide better resistance to short... View More

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