IEEE - Institute of Electrical and Electronics Engineers, Inc. - The manufacture of CMOS integrated circuits in a university microelectronics laboratory

Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium

Author(s): Fuller, L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Minneapolis, MN, USA
Conference Date: 23 June 1999
Page(s): 211 - 215
ISBN (Paper): 0-7803-5240-8
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1999.782855
Regular:

The manufacture of CMOS integrated circuits in a university laboratory course is difficult because the process is complicated and time consuming. At RIT we have developed an approach that allows... View More

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