IEEE - Institute of Electrical and Electronics Engineers, Inc. - Application of statistical simulation to the modeling of IC process yields

Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium

Author(s): Sanders, T.J. ; Means, D.P. ; Hess, G.T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Minneapolis, MN, USA
Conference Date: 23 June 1999
Page(s): 191 - 195
ISBN (Paper): 0-7803-5240-8
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1999.782851
Regular:

This paper presents the results of an R&D program conducted jointly by a small business and a university. The goal of the program is to develop a new methodology for IC process and device... View More

Advertisement