IEEE - Institute of Electrical and Electronics Engineers, Inc. - CMOS and MEMS process investigation

Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium

Author(s): Whipple, T. ; Cibuzar, G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Minneapolis, MN, USA
Conference Date: 23 June 1999
Page(s): 161 - 164
ISBN (Paper): 0-7803-5240-8
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1999.782845
Regular:

As MEMS technology matures as an industry, the integration of standard integrated circuit and MEMS devices will continue to increase. Presented is a brief overview of the work that others have... View More

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