IEEE - Institute of Electrical and Electronics Engineers, Inc. - Young's modulus measurement of thin film PZT
Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium
Author(s): | Jia Zhou ; McMcollough, T. ; Mantell, S.C. ; Zurn, S. |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 January 1999 |
Conference Location: | Minneapolis, MN, USA |
Conference Date: | 23 June 1999 |
Page(s): | 153 - 157 |
ISBN (Paper): | 0-7803-5240-8 |
ISSN (Paper): | 0749-6877 |
DOI: | 10.1109/UGIM.1999.782843 |
Regular:
In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO/sub 2/ were fabricated. In each wafer, circular membranes... View More