IEEE - Institute of Electrical and Electronics Engineers, Inc. - Young's modulus measurement of thin film PZT

Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium

Author(s): Jia Zhou ; McMcollough, T. ; Mantell, S.C. ; Zurn, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Minneapolis, MN, USA
Conference Date: 23 June 1999
Page(s): 153 - 157
ISBN (Paper): 0-7803-5240-8
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1999.782843
Regular:

In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO/sub 2/ were fabricated. In each wafer, circular membranes... View More

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