IEEE - Institute of Electrical and Electronics Engineers, Inc. - Applications of mathematical systems science to nanolithography of integrated circuits

Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium

Author(s): Schaper, C. ; Kailath, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Minneapolis, MN, USA
Conference Date: 23 June 1999
Page(s): 120 - 122
ISBN (Paper): 0-7803-5240-8
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1999.782836
Regular:

An overview is given describing applications of multivariable control, signal processing, optimization, modeling and computation to the lithography sequence. We discuss areas in the patterning... View More

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