IEEE - Institute of Electrical and Electronics Engineers, Inc. - The development of a new microfabrication/MEMS course at the University of Louisville

Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium

Author(s): Walsh, K. ; Hanley, T. ; Pitts, K. ; Crain, M. ; Cole, J. ; Foreman, C. ; Hensel, D. ; Hernandez, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Minneapolis, MN, USA
Conference Date: 23 June 1999
Page(s): 26 - 32
ISBN (Paper): 0-7803-5240-8
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1999.782816
Regular:

This paper presents the development of a new course at the University of Louisville in the area of microfabrication and MEMS. Funding was provided by a grant from the National Science Foundation.... View More

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